US Patent 7148155 Sequential deposition/anneal film densification method
Patent 7148155 was granted and assigned to Novellus Systems on December, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 26, 2004
Date of Patent
December 12, 2006
Patent Application Number
10975028
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 7148155 Sequential deposition/anneal film densification method
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
