US Patent 7157798 Selective refractory metal and nitride capping
Patent 7157798 was granted and assigned to Novellus Systems on January, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 8, 2004
0
Date of Patent
January 2, 2007
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Patent Application Number
10984126
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Patent Inventor Names
James A. Fair
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Jungwan Sung
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Mary Anne Plano
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Nerissa Taylor
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Robert H. Havemann
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Sang-Hyeob Lee
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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