Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Oliver Doll0
Bernd Kolbesen0
Rita Vos0
Paul Mertens0
Albrecht Fester0
Date of Patent
January 9, 2007
0Patent Application Number
104512300
Date Filed
December 21, 2001
0Patent Primary Examiner
Patent abstract
The present invention is related to a composition comprising an oxidizing compound and a complexing compound with the chemical formula wherein R1, R2, R3 and R4 are selected from the group consisting of H and any organic side chain. The oxidizing compound can be in the form of an aqueous solution. The complexing compound is for complexing metal ions. Metal ions can be present in the solution or in an external medium being contacted with the solution. The present invention can be used for cleaning a semiconductor substrate
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