Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 9, 2007
Patent Application Number
11123913
Date Filed
May 6, 2005
Patent Primary Examiner
Patent abstract
In one embodiment, a system to inspect the edge of a wafer, comprises an surface analyzer assembly, a first drive assembly to impart linear motion between the surface analyzer and a first surface of the wafer, and a second drive assembly to impart rotary motion between the surface analyzer and the wafer about an axis parallel to the first surface of the wafer.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
