US Patent 7161667 Wafer edge inspection
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Patent abstract
In one embodiment, a system to inspect the edge of a wafer, comprises an surface analyzer assembly, a first drive assembly to impart linear motion between the surface analyzer and a first surface of the wafer, and a second drive assembly to impart rotary motion between the surface analyzer and the wafer about an axis parallel to the first surface of the wafer.
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US Patent 07161667 Wafer edge inspection US Patent 7161667 Wafer edge inspection
Infobox
Patent Number
0716166700
Patent Number
716166700
Edits on 27 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071616670
Date of Patent
January 9, 2007
0Patent Application Number
111239130
Date Filed
May 6, 2005
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
071616670
Date of Patent
January 9, 2007
0Patent Application Number
111239130
Date Filed
May 6, 2005
0Official Website
Patent Primary Examiner
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US Patent 07161667 Wafer edge inspection
Infobox
Is a
Patent jurisdiction
Patent number
07161667
Date of patent
January 9, 2007
Patent application number
11123913
Date Filed
May 6, 2005
Patent primary examiner
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