Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wenhui Mei0
Akira Ishikawa0
Date of Patent
January 16, 2007
0Patent Application Number
100641560
Date Filed
June 14, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method and system is provided for moving a substrate relative to a pixel panel in a digital photolithography system. The method can be used for performing photolithography on a substrate, the substrate having a first portion with a first design resolution and a second portion with a second design resolution. The method includes scanning the first portion of the substrate, having the first design resolution, at a first speed and scanning the second portion of the substrate, having the second design resolution, at a second speed, different from the first.
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