Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 30, 2007
Patent Application Number
11016875
Date Filed
December 21, 2004
Patent Primary Examiner
Patent abstract
A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.
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