US Patent 7170579 Light source unit, exposure apparatus, and device manufacturing method
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Patent abstract
A light source unit including a condensing mirror for collecting EUV light emitted from a light emission point, a debris reducing member for reducing debris, produced from the light emission point or from a portion around the light emission point, and to be deposited on the condensing mirror, and a base member arranged so that the condensing mirror and the debris reducing member are mounted thereon.
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US Patent 07170579 Light source unit, exposure apparatus, and device manufacturing method US Patent 7170579 Light source unit, exposure apparatus, and device manufacturing method
Infobox
Patent Number
0717057900
Patent Number
717057900
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Infobox
Is a
Patent Jurisdiction
Patent Number
071705790
Date of Patent
January 30, 2007
0Patent Application Number
110168750
Date Filed
December 21, 2004
0Official Website
Patent Primary Examiner
Edits on 25 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
071705790
Date of Patent
January 30, 2007
0Patent Application Number
110168750
Date Filed
December 21, 2004
0Official Website
Patent Primary Examiner
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US Patent 07170579 Light source unit, exposure apparatus, and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07170579
Date of patent
January 30, 2007
Patent application number
11016875
Date Filed
December 21, 2004
Patent primary examiner
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