Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Masakiyo Matsumura0
Yukio Taniguchi0
Yoshinobu Kimura0
Date of Patent
February 6, 2007
0Patent Application Number
107342480
Date Filed
December 15, 2003
0Patent Primary Examiner
Patent abstract
A phase shift mask is arranged before a laser device through a beam expander, a homogenizer and a mirror, and a processed substrate is set on an opposed surface of the phase shift mask with an image forming optical system therebetween. The processed substrate is held at a predetermined position by using a substrate chuck such as a vacuum chuck or an electrostatic chuck.
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