US Patent 7175802 Refurbishing spent sputtering targets
Patent 7175802 was granted and assigned to Heraeus on February, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 16, 2002
0
Date of Patent
February 13, 2007
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Patent Application Number
10243948
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Patent Citations Received
Patent Inventor Names
Bernd Kunkel
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Michael Sandlin
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Wenjun Zhang
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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