Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mohammad Kamarehi0
Date of Patent
February 27, 2007
Patent Application Number
10766973
Date Filed
January 29, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A remote plasma source employs a helical coil slow wave structure to couple microwave energy to a flowing gas to produce plasma for downstream substrate processing, such as photoresist stripping, ashing, or etching. The system also includes cooling structures for removing excess heat from the plasma source components.
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