US Patent 7183514 Helix coupled remote plasma source
Patent 7183514 was granted and assigned to Axcelis Technologies on February, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 29, 2004
Date of Patent
February 27, 2007
Patent Application Number
10766973
Patent Citations Received
Patent Inventor Names
Mohammad Kamarehi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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