Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Pieter Willem Herman De Jager0
Arno Jan Bleeker0
Cheng-Qun Gui0
Joost Sytsma0
Date of Patent
March 13, 2007
0Patent Application Number
107798230
Date Filed
February 18, 2004
0Patent Primary Examiner
Patent abstract
Provided is a radiation distribution system for distributing the radiation from an illumination system to two or more patterning means, each for patterning beams of radiation, which are subsequently projected onto a substrate.
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