Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Badih El-Kareh0
Thomas Scharnagl0
Scott Balster0
Philipp Steinmann0
Date of Patent
March 20, 2007
0Patent Application Number
109286550
Date Filed
August 26, 2004
0Patent Primary Examiner
Patent abstract
Method of producing complementary SiGe bipolar transistors. In a method of producing complementary SiGe bipolar transistors, interface oxide layers (38, 58) for NPN and PNP emitters (44, 64), are separately formed and emitter polysilicon (40, 60) is separately patterned, allowing these layers to be optimized for the respective conductivity type.
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