Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Abaneshwar Prasad0
Date of Patent
March 27, 2007
0Patent Application Number
108070640
Date Filed
March 23, 2004
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
The invention provides a polishing pad comprising a polymeric material having pores and a component that is disposed within the pores, as well as a method of polishing a workpiece with the aforesaid polishing pad, and a method for producing the aforesaid polishing pad.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
