US Patent 7195716 Etching process and patterning process
Patent 7195716 was granted and assigned to United Microelectronics Corporation on March, 2007 by the United States Patent and Trademark Office.
Is a
Date Filed
October 8, 2004
Date of Patent
March 27, 2007
Patent Application Number
10711838
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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