Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chang Jin Lee0
Date of Patent
April 3, 2007
Patent Application Number
10739746
Date Filed
December 18, 2003
Patent Primary Examiner
Patent abstract
Provided is a method for manufacturing a semiconductor device capable of preventing a solution from penetrating a lower layer by forming a poly silicon layer stacked of the films having the different grain boundary structures at border, wherein the solution is used in the subsequent strip and cleaning process.
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