Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yuichiro Sasaki0
Ichiro Nakayama0
Satoshi Maeshima0
Tomohiro Okumura0
Bunji Mizuno0
Date of Patent
April 3, 2007
0Patent Application Number
109353120
Date Filed
September 8, 2004
0Patent Primary Examiner
Patent abstract
With evacuation of an interior of a vacuum chamber halted and with gas supply into the vacuum chamber halted, in a state that a mixed gas of helium gas and diborane gas is sealed in the vacuum chamber, a plasma is generated in a vacuum vessel and simultaneously a high-frequency power is supplied to a sample electrode. By the high-frequency power supplied to the sample electrode, boron is introduced to a proximity to a substrate surface.
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