US Patent 7199384 Inductively-driven light source for lithography
Patent 7199384 was granted and assigned to energetiq technology, inc. on April, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Donald K. Smith0
Matthew M. Besen0
Paul A. Blackborow0
Stephen F. Horne0
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Patent abstract
An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
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US Patent 07199384 Inductively-driven light source for lithography US Patent 7199384 Inductively-driven light source for lithography
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Patent Number
071993840
Patent Number
71993840
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Current Assignee
Patent Jurisdiction
Patent Number
071993840
Date of Patent
April 3, 2007
0Patent Application Number
108889550
Date Filed
July 9, 2004
0Official Website
Patent Primary Examiner
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US Patent 07199384 Inductively-driven light source for lithography
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07199384
Date of patent
April 3, 2007
Patent application number
10888955
Date Filed
July 9, 2004
Patent primary examiner
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