US Patent 7199384 Inductively-driven light source for lithography
Patent 7199384 was granted and assigned to energetiq technology, inc. on April, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 9, 2004
0
Date of Patent
April 3, 2007
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Patent Application Number
10888955
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Patent Inventor Names
Donald K. Smith
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Stephen F. Horne
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Paul A. Blackborow
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Matthew M. Besen
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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