US Patent 7204144 Micromachined apparatus with drive/sensing fingers in coupling levers

Resonator structures include a plurality of resonator masses interconnected by a plurality of levers so as to resonate in anti-phase with one another. The levers include a plurality of lever fingers interdigitated with corresponding fixed fingers affixed to an underlying substrate for at least one of driving movement of the levers and sensing movement of the levers relative to the fixed fingers.