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US Patent 11656077 Pseudo-extensional mode MEMS ring gyroscope

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Date of Patent

May 23, 2023

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Patent Application Number

167163860

Date Filed

December 16, 2019

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An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

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