Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
John A. Geen0
Date of Patent
April 15, 2008
0Patent Application Number
113608470
Date Filed
February 23, 2006
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A mass includes a first set of drive fingers interdigitated with a first array of fixed drive fingers and a second set of drive fingers interdigitated with a second array of fixed drive fingers. Each array of fixed drive fingers is affixed to a substrate using a plurality of anchors. The anchors for the first and second arrays of fixed drive fingers are arranged to be co-linear in a lateral direction relative to the motion of the mass.
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