US Patent 11656077 Pseudo-extensional mode MEMS ring gyroscope
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US Patent 11656077 Pseudo-extensional mode MEMS ring gyroscope
Article
An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
116560770
Date of Patent
May 23, 2023
0Patent Application Number
167163860
Date Filed
December 16, 2019
0Patent Citations
0
Patent Primary Examiner
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