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US Patent 11656077 Pseudo-extensional mode MEMS ring gyroscope

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Analog Devices
Analog Devices
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Date Filed
December 16, 2019
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Date of Patent
May 23, 2023
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Patent Applicant
Analog Devices
Analog Devices
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Patent Application Number
16716386
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Patent Citations
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US Patent 7357025 Micromachined apparatus with co-linear drive arrays
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US Patent 7089792 Micromachined apparatus utilizing box suspensions
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US Patent 7123111 Micro-electromechanical systems
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US Patent 7178378 Resonant sensor and sensing system
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US Patent 7204144 Micromachined apparatus with drive/sensing fingers in coupling levers
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US Patent 7295088 High-Q micromechanical resonator devices and filters utilizing same
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US Patent 8794068 Non-degenerate mode MEMS gyroscope
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US Patent 8803624 MEMS resonator
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US Patent 8919199 Apparatus and method for anchoring electrodes in MEMS devices
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US Patent 9039976 MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
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•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11656077
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Patent Primary Examiner
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Helen C Kwok
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CPC Code
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G01C 19/5677
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G01C 19/5719
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G01C 19/567
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G01C 19/24
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G01C 19/5684
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