Patent attributes
A microelectromechanical system (MEMS) device comprises a substrate; an anchored end connected to the substrate; a free end comprising an end effector opposite to the anchored end; a spring attached to the end effector; multiple actuation beams; multiple connection beams adapted to connect the multiple actuation beams to one another; and an actuator/sensor comprising a first electrode; a piezoelectric layer over the first electrode; and a set of second electrodes over the piezoelectric layer, wherein the set of second electrodes being defined by a transverse gap therebetween. Each of the multiple actuation beams comprises two sets of the second electrodes. The set of second electrodes comprise an extensional electrode and a contraction electrode. One of the sets of second electrodes is actuated asymmetrically with respect to a first plane resulting in a piezoelectrically induced bending moment arm in a lateral direction that lies in a second plane.
