US Patent 7211144 Pulsed nucleation deposition of tungsten layers
Patent 7211144 was granted and assigned to Applied Materials on May, 2007 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 12, 2002
0
Date of Patent
May 1, 2007
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Patent Application Number
10194629
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Patent Citations Received
•••
Patent Inventor Names
Ping Jian
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Alfred W. Mak
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Jong Hyun Yoo
0
Ken Kaung Lai
0
Ming Xi
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Robert L. Jackson
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Xinliang Lu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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