US Patent 7211355 Method for producing phase shifter masks
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Patent abstract
The invention relates to a method for producing phase shifter masks for 157 nm lithography. A coating has an organic material and is at least partially configured on the phase shifter mask. This coating is processed with an electron beam. This allows efficient production of very small structures, even for 157 nm lithography.
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US Patent 07211355 Method for producing phase shifter masks US Patent 7211355 Method for producing phase shifter masks
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Patent Number
0721135500
Patent Number
721135500
Edits on 26 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
072113550
Date of Patent
May 1, 2007
0Patent Application Number
112524760
Date Filed
October 18, 2005
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
072113550
Date of Patent
May 1, 2007
0Patent Application Number
112524760
Date Filed
October 18, 2005
0Official Website
Patent Primary Examiner
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US Patent 07211355 Method for producing phase shifter masks
Infobox
Is a
Patent jurisdiction
Patent number
07211355
Date of patent
May 1, 2007
Patent application number
11252476
Date Filed
October 18, 2005
Patent primary examiner
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