Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eugene P. Marsh0
Date of Patent
May 8, 2007
0Patent Application Number
108483210
Date Filed
May 18, 2004
0Patent Primary Examiner
Patent abstract
A method of forming a conductive structure is disclosed. The method includes forming an interconnect in a substrate, and forming a layer of iridium on the interconnect. The layer of iridium has a thickness of less than six hundred angstroms. The method further includes annealing the layer of iridium, forming a dielectric layer on the layer of iridium, and forming a conductive layer on the dielectric layer.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
