Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Barry Lee-Mean Yang0
Chang Wei0
Yiqun Pan0
Date of Patent
May 22, 2007
0Patent Application Number
108266450
Date Filed
April 16, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Device of layered structures for optical reflectors and method for making the device. A device for providing environmental stability and mechanical integrity in space includes a substrate and a first silicon oxynitride layer on the substrate. The first silicon oxynitride layer has a tensile stress. Additionally, the device includes a second silicon oxynitride layer on the first silicon oxynitride layer. The second silicon oxynitride layer has a compressive stress.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
