Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Min Chul Gil0
Date of Patent
May 29, 2007
Patent Application Number
11138560
Date Filed
May 26, 2005
Patent Primary Examiner
Patent abstract
Disclosed is a method for manufacturing a NAND flash device. After a source line plug hole is formed, a drain contact plug hole is formed. The holes are filled with a conductive material film and are then polished. It is therefore possible to simplify the process since a blanket etch process step is omitted. Moreover, loss of a drain contact plug by the blanket etch process is prevented. It is therefore possible to improve the electrical properties of a device and reduce the manufacturing cost price.
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