US Patent 7223655 Method for manufacturing NAND flash device
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Min Chul Gil0
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Patent abstract
Disclosed is a method for manufacturing a NAND flash device. After a source line plug hole is formed, a drain contact plug hole is formed. The holes are filled with a conductive material film and are then polished. It is therefore possible to simplify the process since a blanket etch process step is omitted. Moreover, loss of a drain contact plug by the blanket etch process is prevented. It is therefore possible to improve the electrical properties of a device and reduce the manufacturing cost price.
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US Patent 07223655 Method for manufacturing NAND flash device US Patent 7223655 Method for manufacturing NAND flash device
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Patent Number
07223655
Patent Number
7223655
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US Patent 07223655 Method for manufacturing NAND flash device
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Patent jurisdiction
Patent number
07223655
Date of patent
May 29, 2007
Patent application number
11138560
Date Filed
May 26, 2005
Patent primary examiner
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