US Patent 7224437 Method for measuring and verifying stepper illumination
Patent 7224437 was granted and assigned to Invarium on May, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Abdurrahman Sezginer0
Franz Xaver Zach0
Gökhan Perçin0
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Patent abstract
An apparatus and method for characterizing an illumination pupil of an exposure tool comprises forming a plurality of pinhole test patterns at a plurality of test site locations to facilitate locating test pattern edges for extracting therefrom the illumination pupil characteristics of the exposure tool.
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US Patent 07224437 Method for measuring and verifying stepper illumination US Patent 7224437 Method for measuring and verifying stepper illumination
Infobox
Patent Number
072244370
Patent Number
72244370
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Current Assignee
Patent Jurisdiction
Patent Number
072244370
Date of Patent
May 29, 2007
0Patent Application Number
111418030
Date Filed
May 31, 2005
0Official Website
Patent Primary Examiner
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US Patent 07224437 Method for measuring and verifying stepper illumination
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07224437
Date of patent
May 29, 2007
Patent application number
11141803
Date Filed
May 31, 2005
Patent primary examiner
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