Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Satish Sundar0
Sanjeev Baluja0
Date of Patent
June 5, 2007
0Patent Application Number
107587530
Date Filed
January 15, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In one embodiment, the invention is a substrate edge gripper assembly for positioning a semiconductor substrate upon a transfer robot. In one embodiment, a modular assembly comprises spring loaded jaws that are mounted on either side of a robot end effector. The jaws are adapted to be actuated by a feature remote from the robot end effector to release the substrate for delivery.
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