Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lindsey H. Hall0
Scott R. Summerfelt0
Date of Patent
June 12, 2007
0Patent Application Number
104475810
Date Filed
May 28, 2003
0Patent Primary Examiner
Patent abstract
An embodiment of the invention is a method of cleaning a material stack 2 that has a hard mask top layer 8. The method involves cleaning the material stack 2 with a fluorine-based plasma etch. The method further involves rinsing the material stack 2 with a wet clean process.
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