US Patent 7228865 FRAM capacitor stack clean
Patent 7228865 was granted and assigned to Texas Instruments on June, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Lindsey H. Hall0
Scott R. Summerfelt0
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Article (+290 characters)
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Patent abstract
An embodiment of the invention is a method of cleaning a material stack 2 that has a hard mask top layer 8. The method involves cleaning the material stack 2 with a fluorine-based plasma etch. The method further involves rinsing the material stack 2 with a wet clean process.
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US Patent 07228865 FRAM capacitor stack clean US Patent 7228865 FRAM capacitor stack clean
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Patent Number
072288650
Patent Number
72288650
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Official Website
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Is a
Current Assignee
Patent Jurisdiction
Patent Number
072288650
Date of Patent
June 12, 2007
0Patent Application Number
104475810
Date Filed
May 28, 2003
0Official Website
Patent Primary Examiner
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US Patent 07228865 FRAM capacitor stack clean
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07228865
Date of patent
June 12, 2007
Patent application number
10447581
Date Filed
May 28, 2003
Patent primary examiner
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