Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bang-Chein Ho0
Jian-Hong Chen0
Ping-Hung Lu0
Yusuke Takano0
Date of Patent
June 26, 2007
0Patent Application Number
104433590
Date Filed
May 22, 2003
0Patent Primary Examiner
Patent abstract
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.
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