US Patent 7235348 Water soluble negative tone photoresist
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Patent Inventor Names
Bang-Chein Ho0
Jian-Hong Chen0
Ping-Hung Lu0
Yusuke Takano0
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Patent abstract
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.
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US Patent 07235348 Water soluble negative tone photoresist US Patent 7235348 Water soluble negative tone photoresist
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Patent Number
072353480
Patent Number
72353480
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Patent Jurisdiction
Patent Number
072353480
Date of Patent
June 26, 2007
0Patent Application Number
104433590
Date Filed
May 22, 2003
0Official Website
Patent Primary Examiner
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US Patent 07235348 Water soluble negative tone photoresist
Infobox
Is a
Patent jurisdiction
Patent number
07235348
Date of patent
June 26, 2007
Patent application number
10443359
Date Filed
May 22, 2003
Patent primary examiner
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