Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
June 26, 2007
Patent Application Number
10496007
Date Filed
November 12, 2002
Patent Primary Examiner
Patent abstract
A probe device 20 having a contact load monitoring device 10. This contact load monitoring device measures the displacement of a loading table caused by a contact load exerted on the mounting table from a probe in an overdrive by means of a displacement sensor 11 disposed in the space below the mounting table as a sinkage quantity. This sinkage quantity is collated with a correlation table to determine the contact load. If the contact load is less than the designed contact load, the mounting table is further overdriven.
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