US Patent 7235984 Probe device and probe method
Patent 7235984 was granted and assigned to Tokyo Electron on June, 2007 by the United States Patent and Trademark Office.
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Patent abstract
A probe device 20 having a contact load monitoring device 10. This contact load monitoring device measures the displacement of a loading table caused by a contact load exerted on the mounting table from a probe in an overdrive by means of a displacement sensor 11 disposed in the space below the mounting table as a sinkage quantity. This sinkage quantity is collated with a correlation table to determine the contact load. If the contact load is less than the designed contact load, the mounting table is further overdriven.
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US Patent 07235984 Probe device and probe method US Patent 7235984 Probe device and probe method
Infobox
Patent Number
0723598400
Patent Number
723598400
Edits on 23 Apr, 2023
Golden AI
Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072359840
Date of Patent
June 26, 2007
0Patent Application Number
104960070
Date Filed
November 12, 2002
0Official Website
Patent Primary Examiner
Edits on 28 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
072359840
Date of Patent
June 26, 2007
0Patent Application Number
104960070
Date Filed
November 12, 2002
0Official Website
Patent Primary Examiner
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US Patent 07235984 Probe device and probe method
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07235984
Date of patent
June 26, 2007
Patent application number
10496007
Date Filed
November 12, 2002
Patent primary examiner
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