Patent 7236848 was granted and assigned to Advanced Micro Devices on June, 2007 by the United States Patent and Trademark Office.
A method, apparatus, and a system for providing data representation associated with non-sampled workpieces. Measured metrology data relating to a first workpiece is received. Metrology data corresponding to a second workpiece is approximated based upon the metrology data relating to the first workpiece to provide a projected metrology data relating to the second workpiece.