Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
James Craig0
Erik J. Mori0
Brian Hong0
Date of Patent
July 10, 2007
0Patent Application Number
114207420
Date Filed
May 27, 2006
0Patent Primary Examiner
Patent abstract
An improved aqueous soluble surfactant which has particular utility for incorporating in etchants for semiconductor devices is provided. The surfactant comprises a combination of a linear perfluorocarboxylic acid, a cyclic amine and an aliphatic alcohol.
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