US Patent 7241920 Filterable surfactant composition
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Patent Inventor Names
Brian Hong0
Erik J. Mori0
James Craig0
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Patent abstract
An improved aqueous soluble surfactant which has particular utility for incorporating in etchants for semiconductor devices is provided. The surfactant comprises a combination of a linear perfluorocarboxylic acid, a cyclic amine and an aliphatic alcohol.
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US Patent 07241920 Filterable surfactant composition US Patent 7241920 Filterable surfactant composition
Infobox
Patent Number
072419200
Patent Number
72419200
Edits on 25 Sep, 2022
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Patent Jurisdiction
Patent Number
072419200
Date of Patent
July 10, 2007
0Patent Application Number
114207420
Date Filed
May 27, 2006
0Official Website
Patent Primary Examiner
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US Patent 07241920 Filterable surfactant composition
Infobox
Is a
Patent jurisdiction
Patent number
07241920
Date of patent
July 10, 2007
Patent application number
11420742
Date Filed
May 27, 2006
Patent primary examiner
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