Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Robert-Han Munnig Schmidt0
Erik Roelof Loopstra0
Felix Godfried Peter Peeters0
Gerard Van Schothorst0
Jan Van Eijk0
Date of Patent
July 24, 2007
0Patent Application Number
108806060
Date Filed
July 1, 2004
0Patent Primary Examiner
Patent abstract
A lithographic apparatus is presented in which vibrations induced by reaction forces exerted on a base frame BF by accelerations within the apparatus are eliminated without the need for complex positioning systems and several balance masses. This is achieved by using feed-forward control to apply a compensating force using actuators to the base frame, based on knowledge of the movements and accelerations of the substrate table and other parts within the apparatus.
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