US Patent 7248339 Lithographic apparatus and device manufacturing method
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Patent Inventor Names
Erik Roelof Loopstra0
Felix Godfried Peter Peeters0
Gerard Van Schothorst0
Jan Van Eijk0
Robert-Han Munnig Schmidt0
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Patent abstract
A lithographic apparatus is presented in which vibrations induced by reaction forces exerted on a base frame BF by accelerations within the apparatus are eliminated without the need for complex positioning systems and several balance masses. This is achieved by using feed-forward control to apply a compensating force using actuators to the base frame, based on knowledge of the movements and accelerations of the substrate table and other parts within the apparatus.
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US Patent 07248339 Lithographic apparatus and device manufacturing method US Patent 7248339 Lithographic apparatus and device manufacturing method
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Patent Number
072483390
Patent Number
72483390
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Patent Jurisdiction
Patent Number
072483390
Date of Patent
July 24, 2007
0Patent Application Number
108806060
Date Filed
July 1, 2004
0Official Website
Patent Primary Examiner
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US Patent 07248339 Lithographic apparatus and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07248339
Date of patent
July 24, 2007
Patent application number
10880606
Date Filed
July 1, 2004
Patent primary examiner
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