Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 31, 2007
Patent Application Number
10986187
Date Filed
November 12, 2004
Patent Primary Examiner
Patent abstract
In an immersion lithography apparatus in which, for example, immersion liquid is supplied to a localized space, a plate is provided to divide the space into two parts. Such a division of the space may facilitate reduction of stray radiation, a temperature gradient, and the transportation of contaminants.
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