US Patent 7251013 Lithographic apparatus and device manufacturing method
All edits
Edits on 1 Sep, 2023
Golden AI
Edits made to:
Article (+320 characters)
Article
Patent abstract
In an immersion lithography apparatus in which, for example, immersion liquid is supplied to a localized space, a plate is provided to divide the space into two parts. Such a division of the space may facilitate reduction of stray radiation, a temperature gradient, and the transportation of contaminants.
Edits on 22 Jul, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 24 May, 2023
Golden AI
Edits made to:
Infobox (+1/-1 properties)
US Patent 07251013 Lithographic apparatus and device manufacturing method US Patent 7251013 Lithographic apparatus and device manufacturing method
Infobox
Patent Number
0725101300
Patent Number
725101300
Edits on 28 Apr, 2023
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
072510130
Date of Patent
July 31, 2007
0Patent Application Number
109861870
Date Filed
November 12, 2004
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
072510130
Date of Patent
July 31, 2007
0Patent Application Number
109861870
Date Filed
November 12, 2004
0Official Website
Patent Primary Examiner
Edits on 15 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 22 Nov, 2021
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 07251013 Lithographic apparatus and device manufacturing method
Infobox
Is a
Patent jurisdiction
Patent number
07251013
Date of patent
July 31, 2007
Patent application number
10986187
Date Filed
November 12, 2004
Patent primary examiner
Find more entities like US Patent 7251013 Lithographic apparatus and device manufacturing method
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
