Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Toshihiko Nakata0
Yukihiro Shibata0
Atsushi Yoshida0
Hiroaki Shishido0
Minoru Yoshida0
Sachio Uto0
Shunji Maeda0
Date of Patent
July 31, 2007
0Patent Application Number
109711090
Date Filed
October 25, 2004
0Patent Primary Examiner
Patent abstract
A defect inspection apparatus for inspecting a fine circuit pattern with high resolution to detect a defective portion is constructed to have an objective lens for detecting an image of a sample, a laser illumination unit for illuminating the sample through the objective lens, a unit for reducing the coherence of the laser illumination, an accumulation type detector, and a unit for processing the detected image signal.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
