Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
July 31, 2007
Patent Application Number
10858757
Date Filed
June 2, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A system and method are provided for detecting contaminants or defects on a reticle in-situ. The system and method provide a system that measures the optical transmission through clear areas on a reticle and determines whether the optical transmission of a reticle has been degraded by contaminants or other defects.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
