Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Akihiro Seki0
Katsuya Takemura0
Takeru Watanabe0
Takeshi Kinsho0
Date of Patent
August 7, 2007
0Patent Application Number
109747590
Date Filed
October 28, 2004
0Patent Primary Examiner
Patent abstract
Resist compositions comprising nitrogen-containing organic compounds having a benzimidazole structure and a specific ether chain moiety have an excellent resolution, form precisely configured patterns with minimized roughness of sidewalls and are useful in microfabrication using electron beams or deep-UV light.
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